ZYGO SPM8020-9274-02 Measuring plate

Description

ZYGO SPM8020-9274-02

This is the Zygo ZMI-4004 series 4-axis VME64x measurement board (part number 8020-0500-01), commonly available in the market as the REVC version (also known as 8020-1500-01). This board is the core electronic module of the Zygo high-precision displacement measurement interferometer (DMI) system, primarily used in semiconductor manufacturing, nano-positioning systems, and other ultra-high precision motion control applications.

 

Key Technical Features

1. Four‑Axis Synchronous Measurement – Simultaneously acquires displacement data for X, Y, Z, and θ axes, compatible with Zygo 7712 laser sources for high‑accuracy displacement calculation.
2. Ultra‑High Resolution – Measurement resolution down to 0.15 nm, meeting sub‑nanometer positioning requirements.
3. High‑Speed Tracking – Maximum displacement tracking speed of 2.55 m/s, capable of capturing fast motion in real time.
4. Low Data Latency – Data age uncertainty in the nanosecond range, ensuring tight time synchronization across the four axes.
5. VME64x Standard – Implements a VME64x bus architecture for easy integration into industrial‑grade control platforms.
6. Compatibility – Works with Zygo 7712, 7713 laser heads and Zygo NewView, Maxim™ software suites, enabling automated measurement, real‑time SPC (process control), and Go/No‑Go inspection.

Typical Applications

• Semiconductor lithography and mask alignment systems
• Nanofabrication and MEMS (Micro‑Electro‑Mechanical Systems) testing
• High‑precision coordinate measuring machines (CMM) and optical inspection platforms
• Research laboratories requiring ultra‑high‑resolution displacement measurement

 

 

Sales of the brand:

ABB、EPRO、GE、FOXBORO、Schneider、Rexroth、Honeywell、Bently、YASKAWA other global DCS system and PLC system, servo system of famous industrial brand.

 

☀️Tara(Sales Director)

📞Tel: + 86-13806028623

📮Whatsapp:+86-13806028623

💬Email: ydf8801@163.com

🏚️Ship to you via DHL/TNT/UPS/EMS/Fedex

🥇Product Condition: One-year warranty

 

requently Asked Questions:
1. How long does it take to receive the goods?
We have stock in stock and can accept same-day payment and delivery!

2. What payment methods do you accept?
There are many methods (T/T…) for you to choose from, and you can choose whatever you want.

3. Is there after-sales service?
Of course, if our products are brand new, they have a one-year warranty!

4. What courier services do you accept? We offer SF Express, DHL, and other international express delivery options.

5. How can I contact you?

You can contact me 24/7 via WeChat, Skype, WhatsApp, LINE, and my email!

 

Company Profile

Xingchuang Ronghe (Fuzhou) Electric Co., Ltd. is a company specializing in the sales and technical services of spare parts for the world’s top industrial automation systems. With our profound industry experience and stable supply channels, we provide domestic and foreign customers with original, authentic, complete models, and fast-delivered precision spare parts solutions. We are your reliable partner in ensuring production continuity and stability.

We specialize in distributing the following core brands and product lines:

ABB

•  Process Control: ABB DCS process control system full range of components.
• ABB FreeLance AC800F power modules: SA801F/SA811F/SD802F/SD812F, EI811F/ABB EI812F/ABB EI813F, etc.
• ABB S800 analog I/O modules: AI801/AI810/AI825/AO801/AO845/AO895
• ABB S800 digital I/O modules: DI801/DI810/DO801/DO810

Bently Nevada
3500 Module Mainboards: 3500/42, 3500/45, 3500/40, 3500/50, etc.
(CPU Modules): 3200/32, 3500/25
3500 Module Minimum Cards: 128229-01, 128229-01, 133442-01, 125800-01, 167699-02, etc.
Extension Cables: 330850-50-05 (for preamplifier), 330730-040-00-00, 330103-00-06-10-02-00, etc.

EPRO

•  MMS6000 TSI System: MMS6110/MMS6210/MMS6220 series monitoring modules.
  Sensors: Proximitor sensors CON011, CON021, CON031, etc

GE

• PLC Systems: IC693, IC695, and IC697 Series Modules.
• Drives and Protection: GE DRIVE SYSTEMS Series Inverters, SR Integrated Protection Frame Series.

Rexroth

• Drives and Motors: Full range of Rexroth servo drives and controllers; models include: servo motor 2AD160B-B0350R2-BS03-D2V1, MSK040C-0600-NN-M1-UP1-NSNN, etc.
• Rexroth communication boards and amplifier boards: MTS-P01.2-D2-B1-E1-NN-NN-FWEP, VT-VPCD-1-1X/V0/1-0-1, VT5006-17B, etc.

Siemens

· Process Instruments and Controllers: Siemens MOORE series, common models include: QLCDM024DCBAN, 39ACM24BEN, 39AC12T4V1, 16114-171, etc.
· Automation Systems: Full range of SIMATIC S5 PLCs, SIMATIC S7-400 CPU modules and expansion modules, Simatic C7 systems, and various Siemens touch screens.