ZYGO SPM8020-9274-028020-0102-018020-0500-01ZMI-4004

Description

ZYGO SPM8020-9274-028020-0102-018020-0500-01ZMI-4004

The ZMI-4004 is Zygo’s high-performance 4-axis VME64x measuring board, a core component of the Zygo Displacement Measurement Interferometer (DMI) series, and is widely used in semiconductor manufacturing, nanotechnology, precision machining, and other scenarios with strict requirements for nanometer-level positioning and measurement.

 

• Technical Specifications
  • Resolution: 0.15 nm (dual‑channel plane‑mirror interferometer configuration)
  • Maximum Speed: 2.55 m/s (dual‑channel plane‑mirror interferometer configuration)
  • Data Rate: 10 MHz, data‑age uncertainty ±0.1 ns (synchronization between axes within the board)
  • Number of Axes: 4 axes per board, 6U VME64x electronic format
  • Applications:
    • Precision Machining: Real‑time monitoring of relative displacement between tool and workpiece to achieve nanometer‑level machining accuracy.
    • Nanotechnology & Research: Used in atomic force microscopes, scanning tunneling microscopes, and other high‑precision positioning platforms.
    • Industrial Automation: Provides high‑speed, low‑noise displacement measurement for advanced CNC machines, optical component manufacturing, and similar fields.
• System Integration: The ZMI‑4004 works together with Zygo laser sources (e.g., the 7712 series) and various interferometers, converting optical signals into high‑resolution displacement calculations. Its low data‑age uncertainty ensures multi‑axis synchronization, meeting the stringent requirements of next‑generation lithography and multilayer technologies.

 

Sales of the brand:

ABB、EPRO、GE、FOXBORO、Schneider、Rexroth、Honeywell、Bently、YASKAWA other global DCS system and PLC system, servo system of famous industrial brand.

 

☀️Tara(Sales Director)

📞Tel: + 86-13806028623

📮Whatsapp:+86-13806028623

💬Email: ydf8801@163.com

🏚️Ship to you via DHL/TNT/UPS/EMS/Fedex

🥇Product Condition: One-year warranty

 

requently Asked Questions:
1. How long does it take to receive the goods?
We have stock in stock and can accept same-day payment and delivery!

2. What payment methods do you accept?
There are many methods (T/T…) for you to choose from, and you can choose whatever you want.

3. Is there after-sales service?
Of course, if our products are brand new, they have a one-year warranty!

4. What courier services do you accept? We offer SF Express, DHL, and other international express delivery options.

5. How can I contact you?

You can contact me 24/7 via WeChat, Skype, WhatsApp, LINE, and my email!

 

Company Profile

Xingchuang Ronghe (Fuzhou) Electric Co., Ltd. is a company specializing in the sales and technical services of spare parts for the world’s top industrial automation systems. With our profound industry experience and stable supply channels, we provide domestic and foreign customers with original, authentic, complete models, and fast-delivered precision spare parts solutions. We are your reliable partner in ensuring production continuity and stability.

We specialize in distributing the following core brands and product lines:

ABB

•  Process Control: ABB DCS process control system full range of components.
• ABB FreeLance AC800F power modules: SA801F/SA811F/SD802F/SD812F, EI811F/ABB EI812F/ABB EI813F, etc.
• ABB S800 analog I/O modules: AI801/AI810/AI825/AO801/AO845/AO895
• ABB S800 digital I/O modules: DI801/DI810/DO801/DO810

Bently Nevada
3500 Module Mainboards: 3500/42, 3500/45, 3500/40, 3500/50, etc.
(CPU Modules): 3200/32, 3500/25
3500 Module Minimum Cards: 128229-01, 128229-01, 133442-01, 125800-01, 167699-02, etc.
Extension Cables: 330850-50-05 (for preamplifier), 330730-040-00-00, 330103-00-06-10-02-00, etc.

EPRO

•  MMS6000 TSI System: MMS6110/MMS6210/MMS6220 series monitoring modules.
  Sensors: Proximitor sensors CON011, CON021, CON031, etc

GE

• PLC Systems: IC693, IC695, and IC697 Series Modules.
• Drives and Protection: GE DRIVE SYSTEMS Series Inverters, SR Integrated Protection Frame Series.

Rexroth

• Drives and Motors: Full range of Rexroth servo drives and controllers; models include: servo motor 2AD160B-B0350R2-BS03-D2V1, MSK040C-0600-NN-M1-UP1-NSNN, etc.
• Rexroth communication boards and amplifier boards: MTS-P01.2-D2-B1-E1-NN-NN-FWEP, VT-VPCD-1-1X/V0/1-0-1, VT5006-17B, etc.

Siemens

· Process Instruments and Controllers: Siemens MOORE series, common models include: QLCDM024DCBAN, 39ACM24BEN, 39AC12T4V1, 16114-171, etc.
· Automation Systems: Full range of SIMATIC S5 PLCs, SIMATIC S7-400 CPU modules and expansion modules, Simatic C7 systems, and various Siemens touch screens.