Description
Zygo ZMI-2001 BD 8020-0210 8020-0210-01
This is a single-axis 6U VME measurement board provided by Zygo for displacement measurement interferometer (DMI) systems, typically used with the ZMI-2000 series laser head. The board can be mounted on either the VME or ISA backplane and is specifically designed for high-resolution, real-time position control.
Key Features and Specifications
| Item | Description |
|---|---|
| Number of Axes | Single axis (ZMI‑2001, ZMI PC) — the ZMI‑2002 provides dual axes |
| Form Factor / Interface | 6U VME card, compatible with A16/A24 addressing and D16/D32 data transfers, supports Do8 interrupt acknowledge; also available as a full‑length ISA card (16‑bit ISA bus) and 32‑bit P2 bus |
| Power Requirements | +5 V ± 5 % @ 3.5 A (ZMI‑2001/2002/PC) +12 V ± 10 % @ 0.1 A (ZMI PC only) |
| Position Data | 36‑bit two’s‑complement format |
| Velocity Data | 32‑bit two’s‑complement format |
| Time Range | 107.4 s, 32‑bit two’s‑complement, 25 ns resolution |
| Fiber Optic Signals | Both reference and measurement signals are transmitted via optical fiber |
| Error Status Monitoring | • Reference side: signal, PLL, DLL status • Measurement side: loss, dropped frames, glitches • Velocity: board‑level, user‑defined • Acceleration, overflow (32‑bit, 36‑bit) |
| System Synchronization | Supports clock input or clock output |
| Data‑Age Uncertainty | ±36 ns (uncompensated) for ZMI‑2001; reduced to ±1.4 ns when compensated |
| Compatibility | Conforms to VMEBus specification C.1, UL94Vo rating, suitable for standard 6U VME backplanes |
Typical Applications
- Lithography & Semiconductor Manufacturing: Optical steppers, scanners, electron‑beam/laser mask writers
- Inspection & Metrology: Mask, wafer, LCD inspection tools, CD‑SEM systems
- Process Equipment: Memory repair, precision machining, optical alignment, and any real‑time position‑control requirement
Core Advantages
- High Resolution: λ/2048 (≈ 0.31 nm) per channel; dual‑channel operation can reach λ/4096 (≈ 0.15 nm)
- Fast Response: Up to 2.1 m/s (dual‑channel) or 1.05 m/s (single‑channel)
Data age limited to a few tens of nanoseconds, ensuring accurate real‑time control - Modular Integration: The measurement board plugs directly into any 6U VME or ISA backplane, simplifying system design and reducing cost
Sales of the brand:
ABB、EPRO、GE、FOXBORO、Schneider、Rexroth、Honeywell、Bently、YASKAWA other global DCS system and PLC system, servo system of famous industrial brand.
☀️Tara(Sales Director)
📞Tel: + 86-13806028623
📮Whatsapp:+86-13806028623
💬Email: ydf8801@163.com
🏚️Ship to you via DHL/TNT/UPS/EMS/Fedex
🥇Product Condition: One-year warranty
requently Asked Questions:
1. How long does it take to receive the goods?
We have stock in stock and can accept same-day payment and delivery!
2. What payment methods do you accept?
There are many methods (T/T…) for you to choose from, and you can choose whatever you want.
3. Is there after-sales service?
Of course, if our products are brand new, they have a one-year warranty!
4. What courier services do you accept? We offer SF Express, DHL, and other international express delivery options.
5. How can I contact you?
You can contact me 24/7 via WeChat, Skype, WhatsApp, LINE, and my email!
Company Profile
Xingchuang Ronghe (Fuzhou) Electric Co., Ltd. is a company specializing in the sales and technical services of spare parts for the world’s top industrial automation systems. With our profound industry experience and stable supply channels, we provide domestic and foreign customers with original, authentic, complete models, and fast-delivered precision spare parts solutions. We are your reliable partner in ensuring production continuity and stability.
We specialize in distributing the following core brands and product lines:
ABB
- Process Control: ABB DCS process control system full range of components.
- ABB FreeLance AC800F power modules: SA801F/SA811F/SD802F/SD812F, EI811F/ABB EI812F/ABB EI813F, etc.
- ABB S800 analog I/O modules: AI801/AI810/AI825/AO801/AO845/AO895
- ABB S800 digital I/O modules: DI801/DI810/DO801/DO810
Bently Nevada
3500 Module Mainboards: 3500/42, 3500/45, 3500/40, 3500/50, etc.
(CPU Modules): 3200/32, 3500/25
3500 Module Minimum Cards: 128229-01, 128229-01, 133442-01, 125800-01, 167699-02, etc.
Extension Cables: 330850-50-05 (for preamplifier), 330730-040-00-00, 330103-00-06-10-02-00, etc.
EPRO
- MMS6000 TSI System: MMS6110/MMS6210/MMS6220 series monitoring modules.
Sensors: Proximitor sensors CON011, CON021, CON031, etc
GE
- PLC Systems: IC693, IC695, and IC697 Series Modules.
- Drives and Protection: GE DRIVE SYSTEMS Series Inverters, SR Integrated Protection Frame Series.
Rexroth
- Drives and Motors: Full range of Rexroth servo drives and controllers; models include: servo motor 2AD160B-B0350R2-BS03-D2V1, MSK040C-0600-NN-M1-UP1-NSNN, etc.
- Rexroth communication boards and amplifier boards: MTS-P01.2-D2-B1-E1-NN-NN-FWEP, VT-VPCD-1-1X/V0/1-0-1, VT5006-17B, etc.
Siemens
· Process Instruments and Controllers: Siemens MOORE series, common models include: QLCDM024DCBAN, 39ACM24BEN, 39AC12T4V1, 16114-171, etc.
· Automation Systems: Full range of SIMATIC S5 PLCs, SIMATIC S7-400 CPU modules and expansion modules, Simatic C7 systems, and various Siemens touch screens.
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