Description
Zygo ZMI-2001 ESI PCB-IE- 144
This is a high-precision, low-noise single-axis interferometric measurement card, compatible with the VME/ISA platform, specifically designed for ESIPCB-I-E-144 semiconductor measurement systems to provide sub-nanometer resolution and ±0.1µm accuracy displacement detection.
- Purpose – A single‑axis interferometric measurement board designed for the ESI PCB‑I‑E‑144 position‑measurement application in semiconductor processing systems.
- Number of measurement axes – 1 axis (single‑axis version; the ZMI‑2002 provides two axes).
- Resolution – Better than 1 nm (the ZMI‑2002 family advertises “< 1 nm” resolution, and the ZMI‑2001 uses the same interferometric technology).
- Measurement accuracy – ±0.1 µm (identical to the ZMI‑2002 specification).
- Operating temperature range – 0 °C ~ +40 °C (specified for the ZMI‑2002 series).
- Power requirements – +5 V ±5 % 3.5 A and +12 V ±10 % 0.1 A (the ZMI‑2002 board’s power supply, which is the same architecture used by the ZMI‑2001).
- Interface – Compatible with 6U VMEbus and ISA back‑plane slots; can be installed directly into a standard VME/ISA chassis.
- Dimensions – Approximately 229 mm × 114 mm × 29 mm (the ZMI‑2002 mechanical envelope, which the ZMI‑2001 shares).
- Weight – About 1.2 kg (same as the ZMI‑2002 board).
- Enclosure material – Aluminum alloy, providing good heat dissipation and mechanical rigidity.
- Key features
- Utilises Zygo’s proprietary interferometric measurement technique to achieve sub‑nanometer resolution and low‑noise performance.
- Supplies independent real‑time position, time, and velocity data, which can be accessed via the P2 connector or directly over the VME bus.
- Offers a programmable synchronization signal for easy integration with external motion‑control systems.
- The simplified P2 interface allows one or multiple boards to be bus‑connected to a single servo card or motor controller.
- Designed for compact installation in a 6U VME or ISA backplane, minimizing the number of required slots.
Sales of the brand:
ABB、EPRO、GE、FOXBORO、Schneider、Rexroth、Honeywell、Bently、YASKAWA other global DCS system and PLC system, servo system of famous industrial brand.
☀️Tara(Sales Director)
📞Tel: + 86-13806028623
📮Whatsapp:+86-13806028623
💬Email: ydf8801@163.com
🏚️Ship to you via DHL/TNT/UPS/EMS/Fedex
🥇Product Condition: One-year warranty
requently Asked Questions:
1. How long does it take to receive the goods?
We have stock in stock and can accept same-day payment and delivery!
2. What payment methods do you accept?
There are many methods (T/T…) for you to choose from, and you can choose whatever you want.
3. Is there after-sales service?
Of course, if our products are brand new, they have a one-year warranty!
4. What courier services do you accept? We offer SF Express, DHL, and other international express delivery options.
5. How can I contact you?
You can contact me 24/7 via WeChat, Skype, WhatsApp, LINE, and my email!
Company Profile
Xingchuang Ronghe (Fuzhou) Electric Co., Ltd. is a company specializing in the sales and technical services of spare parts for the world’s top industrial automation systems. With our profound industry experience and stable supply channels, we provide domestic and foreign customers with original, authentic, complete models, and fast-delivered precision spare parts solutions. We are your reliable partner in ensuring production continuity and stability.
We specialize in distributing the following core brands and product lines:
ABB
- Process Control: ABB DCS process control system full range of components.
- ABB FreeLance AC800F power modules: SA801F/SA811F/SD802F/SD812F, EI811F/ABB EI812F/ABB EI813F, etc.
- ABB S800 analog I/O modules: AI801/AI810/AI825/AO801/AO845/AO895
- ABB S800 digital I/O modules: DI801/DI810/DO801/DO810
Bently Nevada
3500 Module Mainboards: 3500/42, 3500/45, 3500/40, 3500/50, etc.
(CPU Modules): 3200/32, 3500/25
3500 Module Minimum Cards: 128229-01, 128229-01, 133442-01, 125800-01, 167699-02, etc.
Extension Cables: 330850-50-05 (for preamplifier), 330730-040-00-00, 330103-00-06-10-02-00, etc.
EPRO
- MMS6000 TSI System: MMS6110/MMS6210/MMS6220 series monitoring modules.
Sensors: Proximitor sensors CON011, CON021, CON031, etc
GE
- PLC Systems: IC693, IC695, and IC697 Series Modules.
- Drives and Protection: GE DRIVE SYSTEMS Series Inverters, SR Integrated Protection Frame Series.
Rexroth
- Drives and Motors: Full range of Rexroth servo drives and controllers; models include: servo motor 2AD160B-B0350R2-BS03-D2V1, MSK040C-0600-NN-M1-UP1-NSNN, etc.
- Rexroth communication boards and amplifier boards: MTS-P01.2-D2-B1-E1-NN-NN-FWEP, VT-VPCD-1-1X/V0/1-0-1, VT5006-17B, etc.
Siemens
· Process Instruments and Controllers: Siemens MOORE series, common models include: QLCDM024DCBAN, 39ACM24BEN, 39AC12T4V1, 16114-171, etc.
· Automation Systems: Full range of SIMATIC S5 PLCs, SIMATIC S7-400 CPU modules and expansion modules, Simatic C7 systems, and various Siemens touch screens.
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