ZYGO ZMI-2001 MEASURE BD 8020-0210-01-J VME

Description

ZYGO ZMI-2001 MEASURE BD 8020-0210-01-J VME

Zygo offers a Displacement Measuring Interferometer (DMI) system for high-end real-time position control.

 

Key Technical Specifications

Parameter	Specification
Resolution	λ/2048 ≈ 0.31 nm (2‑Pass PMI)
Travel Range	±10.6 m (2‑Pass PMI)
Maximum Speed	2.1 m/s
Maximum Acceleration	980 m/s² (≈100 g)
Data Age	335 ns
Data‑Age Uncertainty	Single‑axis: ±15 ns (ZMI‑2001) Dual‑axis synchronous compensation: ±1.2 ns Multi‑axis (8‑axis) compensation: ±1.7 ns
Laser Head	He‑Ne continuous‑wave dual‑frequency, 425 µW (minimum) / 600 µW (typical) power, 20 MHz ± 1.6 kHz frequency split, vacuum wavelength accuracy ±0.1 ppm (lifetime), stability ±0.01 ppm (24 h), fiber‑optic reference signal
Measurement Board (ZMI‑2001)	6U VME, single‑axis Power: +5 V ±5 % @ 3.5 A ( +12 V ±10 % @ 0.1 A for PC version only ) Position data: 36‑bit 2’s complement Velocity data: 32‑bit 2’s complement Time range: 107.4 s, 25 ns resolution (32‑bit) Fiber signals: reference + measurement Error monitoring: signal, PLL, DLL, loss, jitter, overflow, etc. Interfaces: VME (A16/A24, D16/D32), ISA 16‑bit, P2 32‑bit (up to 7.7 MHz)
Synchronization	Optional clock I/O, supports multi‑axis sync (up to 8 axes)
Mechanical Size	Standard 6U VME card, UL94Vo certified
Lifetime / Warranty	Laser head > 50 000 h, standard warranty 18 months, optional extension up to 5 years
Compliance	NCDRH 21 CFR J (laser safety)

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Core Features

1. Ultra‑high positioning accuracy – λ/2048 (≈0.31 nm) resolution with data‑age uncertainty ≤ 1.7 ns, eliminating velocity‑ and time‑related errors.
2. High‑speed scanning – 20 MHz heterodyne split enables 2.1 m/s scan speed, suitable for fast feedback loops.
3. Compact integration – Single‑card, single‑axis design saves back‑plane space and reduces thermal and ESD concerns.
4. Multi‑axis synchronization – Up to eight axes can be synchronized, offering compensated and uncompensated data‑age options.
5. Programmable – Full control via the bus, allowing custom sync signals and error handling.
6. Robust laser source – In‑house He‑Ne dual‑frequency laser tube with > 50 000 h lifetime, stable output, and fiber‑optic reference.
7. Broad application range – Lithography, mask/wafer/LCD inspection, memory‑device repair, precision calibration (piezo, linear/rotary stages, AFM), and other high‑end industrial and research environments.

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Typical Use Cases

• Lithography & Mask Inspection – Provides nanometre‑level feedback for wafer steppers and scanners.
• Wafer / LCD Panel Metrology – High‑precision displacement measurement for dimensional control and defect detection.
• Memory‑Device Repair – Enables precise calibration of hard‑disk, SSD, and other storage media positioning.
• Research Laboratories – Integrated into optical test rigs, atomic‑force microscopes (AFM), and other setups requiring high‑resolution displacement sensing.

 

 

Sales of the brand:

ABB、EPRO、GE、FOXBORO、Schneider、Rexroth、Honeywell、Bently、YASKAWA other global DCS system and PLC system, servo system of famous industrial brand.

 

☀️Tara(Sales Director)

📞Tel: + 86-13806028623

📮Whatsapp:+86-13806028623

💬Email: ydf8801@163.com

🏚️Ship to you via DHL/TNT/UPS/EMS/Fedex

🥇Product Condition: One-year warranty

 

requently Asked Questions:
1. How long does it take to receive the goods?
We have stock in stock and can accept same-day payment and delivery!

2. What payment methods do you accept?
There are many methods (T/T…) for you to choose from, and you can choose whatever you want.

3. Is there after-sales service?
Of course, if our products are brand new, they have a one-year warranty!

4. What courier services do you accept? We offer SF Express, DHL, and other international express delivery options.

5. How can I contact you?

You can contact me 24/7 via WeChat, Skype, WhatsApp, LINE, and my email!

 

Company Profile

Xingchuang Ronghe (Fuzhou) Electric Co., Ltd. is a company specializing in the sales and technical services of spare parts for the world’s top industrial automation systems. With our profound industry experience and stable supply channels, we provide domestic and foreign customers with original, authentic, complete models, and fast-delivered precision spare parts solutions. We are your reliable partner in ensuring production continuity and stability.

We specialize in distributing the following core brands and product lines:

ABB

•  Process Control: ABB DCS process control system full range of components.
• ABB FreeLance AC800F power modules: SA801F/SA811F/SD802F/SD812F, EI811F/ABB EI812F/ABB EI813F, etc.
• ABB S800 analog I/O modules: AI801/AI810/AI825/AO801/AO845/AO895
• ABB S800 digital I/O modules: DI801/DI810/DO801/DO810

Bently Nevada
3500 Module Mainboards: 3500/42, 3500/45, 3500/40, 3500/50, etc.
(CPU Modules): 3200/32, 3500/25
3500 Module Minimum Cards: 128229-01, 128229-01, 133442-01, 125800-01, 167699-02, etc.
Extension Cables: 330850-50-05 (for preamplifier), 330730-040-00-00, 330103-00-06-10-02-00, etc.

EPRO

•  MMS6000 TSI System: MMS6110/MMS6210/MMS6220 series monitoring modules.
  Sensors: Proximitor sensors CON011, CON021, CON031, etc

GE

• PLC Systems: IC693, IC695, and IC697 Series Modules.
• Drives and Protection: GE DRIVE SYSTEMS Series Inverters, SR Integrated Protection Frame Series.

Rexroth

• Drives and Motors: Full range of Rexroth servo drives and controllers; models include: servo motor 2AD160B-B0350R2-BS03-D2V1, MSK040C-0600-NN-M1-UP1-NSNN, etc.
• Rexroth communication boards and amplifier boards: MTS-P01.2-D2-B1-E1-NN-NN-FWEP, VT-VPCD-1-1X/V0/1-0-1, VT5006-17B, etc.

Siemens

· Process Instruments and Controllers: Siemens MOORE series, common models include: QLCDM024DCBAN, 39ACM24BEN, 39AC12T4V1, 16114-171, etc.
· Automation Systems: Full range of SIMATIC S5 PLCs, SIMATIC S7-400 CPU modules and expansion modules, Simatic C7 systems, and various Siemens touch screens.