Description
ZYGO ZMI-4004 Displacement Measurement Interferometer
The ZMI-4004 is a high-performance, 4-axis displacement measurement board from Zygo’s ZMI™ 4000 series. It is designed for demanding metrology applications requiring ultra-high precision, such as semiconductor manufacturing, precision machining, and scientific research. This board utilizes interferometric signals generated by compatible Zygo lasers to calculate displacement with sub-nanometer resolution1.
Key Features
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High-Channel Density: Supports 4 independent measurement axes per 6U VME64x board, enabling multi-axis system integration1.
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Sub-Nanometer Resolution: Offers an exceptionally high position resolution of 0.15 nm, ensuring precise measurement capabilities1.
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High-Speed Performance: Capable of measuring at high velocities up to ±2.55 m/s while maintaining outstanding accuracy1.
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Patented Cyclic Error Compensation: This feature automatically and seamlessly eliminates inherent nonlinear errors common in displacement measuring interferometer (DMI) systems, which is crucial for achieving the highest levels of measurement accuracy1.
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High Sensitivity: Requires a very low minimum optical power of just 0.07 μW for operation, enhancing its compatibility and sensitivity in various setup conditions1.
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Modular Scalability: Designed as a VME board, it can be modularly added to a VME chassis, supporting system expansion up to 64 measurement axes1.
Technical Specifications
| Feature | Specification |
|---|---|
| Model | ZMI-4004 |
| Product Type | 6U VME64x Board |
| Number of Axes per Board | 4 |
| Position Resolution | 0.15 nm |
| Maximum Velocity | ±2.55 m/s |
| Accuracy (σ) at Max Velocity | 0.2 nm |
| Minimum Optical Power | 0.07 μW |
| Cyclic Error Compensation | Yes |
| Compatible Lasers | Zygo 7702, 7714, and 7724 series |
| Note | Specifications are for a double-pass interferometer. |
Typical Applications
The ZMI-4004 is suited for the most challenging precision metrology applications, including:
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Semiconductor lithography equipment
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Precision motion control and stage positioning
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Nano-metrology and calibration systems
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High-accuracy manufacturing and inspection systems
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Advanced scientific research setups
System Integration Notes
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The ZMI-4004 requires a compatible Zygo laser source (e.g., 7702, 7714, 7724 series) and interferometer optics to form a complete measurement system1.
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It is designed for integration into a VME chassis, allowing for multi-axis configurations in industrial and research environments
Why Choose ZMI-4004?
The ZMI-4004 is ideal for applications demanding uncompromising precision, multi-axis capability, and robust performance at high speeds. Its integrated cyclic error compensation ensures data integrity and high accuracy, making it a reliable choice for critical measurement tasks.
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