ZYGO ZMI-2001ESI 9830 Single-axis interferometer module

Description

ZYGO ZMI-2001ESI 9830

ZYGO’s single-axis interferometer system is designed for high-precision displacement measurement and real-time position control. It adopts a modular design with a 6U VME specification and is designed to provide nanometer-level displacement feedback for lithography, masking, inspection and other high-end semiconductor manufacturing equipment.

Key Technical Features

• Single‑Axis Measurement: Based on the ZMI‑2001 series single‑axis 6U VME card, delivering real‑time interferometric measurement on one axis.
• Resolution & Accuracy: 36‑bit two’s‑complement position data with a time resolution of 25 ns; measurement range up to several meters, meeting sub‑nanometer positioning requirements.
• Fiber‑Optic Transmission: Both reference and measurement beams are conveyed via optical fibers, reducing thermal noise, ESD sensitivity, and providing electrical isolation.
• High‑Speed Data Interface: Supports VME‑Bus (A16/A24 addressing, D16/D32 data) and P2 bus, with a maximum data rate of 7.7 MHz, suitable for multi‑axis synchronized control.
• Multi‑Function Outputs: Provides position, velocity (32‑bit two’s‑complement), and acceleration information, with user‑definable velocity/acceleration calculations.
• System Synchronization: Optional external clock input/output enables time synchronization across multiple cards or systems.
• Compatibility: Conforms to VMEBus C.1 specifications and standard VME backplane, allowing easy insertion into existing control platforms.

Typical Application Scenarios

• Real‑time positioning loops in lithography machines and scanning projection systems.
• High‑precision displacement measurement for mask, wafer, and LCD inspection equipment.
• Memory repair, micro‑fabrication, and other processes requiring nanometer‑level closed‑loop control.

Product Specification Overview (excerpt from the official technical manual)

• Power Supply: +5 V ± 5 % @ 3.5 A (main card), +12 V ± 10 % @ 0.1 A (PC card).
• Position Format: 36‑bit two’s‑complement.
• Velocity Format: 32‑bit two’s‑complement.
• Time Range: 107.4 s with a time resolution of 25 ns.
• Interfaces: VME (A16/A24, D16/D32), P2 (32‑bit).
• Dimensions: 6U VME card, compliant with UL94Vo fire‑rating standards.

Sales of the brand:

ABB、EPRO、GE、FOXBORO、Schneider、Rexroth、Honeywell、Bently、YASKAWA other global DCS system and PLC system, servo system of famous industrial brand.

 

☀️Tara(Sales Director)

📞Tel: + 86-13806028623

📮Whatsapp:+86-13806028623

💬Email: ydf8801@163.com

🏚️Ship to you via DHL/TNT/UPS/EMS/Fedex

🥇Product Condition: One-year warranty

 

requently Asked Questions:
1. How long does it take to receive the goods?
We have stock in stock and can accept same-day payment and delivery!

2. What payment methods do you accept?
There are many methods (T/T…) for you to choose from, and you can choose whatever you want.

3. Is there after-sales service?
Of course, if our products are brand new, they have a one-year warranty!

4. What courier services do you accept? We offer SF Express, DHL, and other international express delivery options.

5. How can I contact you?

You can contact me 24/7 via WeChat, Skype, WhatsApp, LINE, and my email!

 

Company Profile

Xingchuang Ronghe (Fuzhou) Electric Co., Ltd. is a company specializing in the sales and technical services of spare parts for the world’s top industrial automation systems. With our profound industry experience and stable supply channels, we provide domestic and foreign customers with original, authentic, complete models, and fast-delivered precision spare parts solutions. We are your reliable partner in ensuring production continuity and stability.

We specialize in distributing the following core brands and product lines:

ABB

•  Process Control: ABB DCS process control system full range of components.
• ABB FreeLance AC800F power modules: SA801F/SA811F/SD802F/SD812F, EI811F/ABB EI812F/ABB EI813F, etc.
• ABB S800 analog I/O modules: AI801/AI810/AI825/AO801/AO845/AO895
• ABB S800 digital I/O modules: DI801/DI810/DO801/DO810

Bently Nevada
3500 Module Mainboards: 3500/42, 3500/45, 3500/40, 3500/50, etc.
(CPU Modules): 3200/32, 3500/25
3500 Module Minimum Cards: 128229-01, 128229-01, 133442-01, 125800-01, 167699-02, etc.
Extension Cables: 330850-50-05 (for preamplifier), 330730-040-00-00, 330103-00-06-10-02-00, etc.

EPRO

•  MMS6000 TSI System: MMS6110/MMS6210/MMS6220 series monitoring modules.
  Sensors: Proximitor sensors CON011, CON021, CON031, etc

GE

• PLC Systems: IC693, IC695, and IC697 Series Modules.
• Drives and Protection: GE DRIVE SYSTEMS Series Inverters, SR Integrated Protection Frame Series.

Rexroth

• Drives and Motors: Full range of Rexroth servo drives and controllers; models include: servo motor 2AD160B-B0350R2-BS03-D2V1, MSK040C-0600-NN-M1-UP1-NSNN, etc.
• Rexroth communication boards and amplifier boards: MTS-P01.2-D2-B1-E1-NN-NN-FWEP, VT-VPCD-1-1X/V0/1-0-1, VT5006-17B, etc.

Siemens

· Process Instruments and Controllers: Siemens MOORE series, common models include: QLCDM024DCBAN, 39ACM24BEN, 39AC12T4V1, 16114-171, etc.
· Automation Systems: Full range of SIMATIC S5 PLCs, SIMATIC S7-400 CPU modules and expansion modules, Simatic C7 systems, and various Siemens touch screens.